Overview:
Atomic layer deposition systems at Argonne National Laboratory and National Renewable
Energy Laboratory provide the ability to deposit thin films with desired thickness
and chemical composition onto 2- and 3-dimensional catalytic materials, including
powder samples. These systems can deposit metal oxides, sulfides, selenides, and pure
platinum group metals and have in situ diagnostics including quartz crystal microbalances, IR spectroscopy, and mass spectrometry.
Integrated glove boxes allow for air-free handling and solid, liquid, and gas precursors
are supported. Catalytic materials synthesized or modified by atomic layer deposition
have shown better resistance to sintering under high temperature conditions and have
shown enhanced performance by tailoring the active site for the reaction of interest.
Additional Information:
Atomic Layer Deposition at Argonne National Laboratory
National Laboratories:
Argonne National Laboratory
National Renewable Energy Laboratory
